CRF Intranet

Plasma Enhanced Chemical Vapor Deposition System (CRF IIT Delhi ) Facility

SAMCO PECVD (Model: PD-2202L) is a highly advanced, state-of-the-art plasma chemical vapor deposition system with an unrivaled task-oriented user interface. It is a fundamental deposition system for semiconductor fabrication and material science facilities. Used in R&D and low volume production applications, the classic parallel plate configuration provides a wide range of high-quality, uniform films. It utilizes plasma to give some of the energy for the deposition reaction. Plasma is created by RF frequency discharge between two parallel plate electrodes, the space between which is filled with the reacting gases.

Essential specifications:
  1. Reactant gases: Silane (pure SiH4), Hydrogen (H2), Phosphine (4 % in SiH4) and Diborane (3 % in H2).
  2. Temperature range: up to 250 ⁰C
  3. Pressure depends on the flow of gasses (Max 100 Pa) ·         
  4. Three frequency RF generator (13.56 MHz, 27.12 MHz and 40.68 MHz).
Applications and Performance: 
Samples required for PECVD:

Deposition can be done on both glass and silicon wafers (2 inch to 4-inch sample size)

Testing Charges (Click here)

How to contact

Lab-Physical Location: 

Contact person:
Mr. Ashutosh Pandey 
PECVD Lab Block 6 NMF 1st Floor Clean Room IV IIT Delhi Hauz Khas 110016

Lab Coordinator

Prof Vamsi K. Komarala 
Department of Energy Science and Engineering
Indian Institute of Technology Delhi 
Tel.: +91-11-2659 1255 (O)
Email: vamsi@iitd.ac.in

Operational In-charge

Mr. Ashutosh Pandey
Email: pashutosh827@gmail.com 
Phone No. 011-2659-6408

Get CRF Registration for 
External users 

1. Registration process (One Time): New Registration for external users.User Verification: Upload photo of Front side and back side of valid Identity card issued by the organization (only .jpeg format, file Size less than 1 Mb, height less than 1000 pixels, width less than 800 pixels). Undertaking: Download the undertaking template ( Download Link ). Duly filled, signed and stamped form should be uploaded in .pdf format. Confirmation: An email will be sent to the user after verification of the documents.

2.Before planning to avail the Instrument facility of CRF IIT Delhi: user must visit https://crf.iitd.ac.in -> Facility -> select the desired facility from left side navigation list.  Read carefully all the relevant information such as required sample type, testing charges and instrument location. Be prepared with details of the samples.

3.Log in and Click on Booking Appointment Tab: All the information relevant to testing must be filled in instrument booking form. In case user does not provide the required information the booking is liable to be rejected. User can upload the relevant existing data of their samples that might help in the measurements.

4.Sample submission & Payment Process: Once the application is submitted, the in-charge will verify the details and approve the request.External users must wait for the approval before making the payment and submitting the samples to concerned lab. After approval the payment should be made by the user. The payment transaction details need to be submitted online before appointment date time.

5.CRF Users can pay amount online using following details:
Beneficiary/Customer's Name: IRD ACCOUNT IITD
Bank Account Number:  10773572600  
Bank Name: State Bank of India Branch Name: IIT Branch
Branch Code: 01077
NEFT IFSC CODE / RTGS: SBIN0001077
please write "CRF _Instrument Name" in the Remarks section while paying. Save the receipt file and upload in the crfbooking system online against your application.Payment can also made in form of demand draft in favour of " IRD ACCOUNT IITD " Payable at New Delhi.6.IIT Delhi 
GST Number : 07AAATI0393L1ZI
PAN Number : AAATI0393L

Signup (External user)

CRF IIT Delhi 
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